Nikon Patents

Nikon Corporation manufactures and sells semiconductor and FPD lithography equipment, digital cameras, lenses and accessories, and microscopes and other measuring instruments.

Nikon Patents by Type
  • Nikon Patents Granted: Nikon patents that have been granted by the United States Patent and Trademark Office (USPTO).
  • Nikon Patent Applications: Nikon patent applications that are pending before the United States Patent and Trademark Office (USPTO).
  • Publication number: 20210301246
    Abstract: An image processing device includes: a processor; and a memory encoded with instructions executed by the processor, including: imaging pluripotent stem cells with time in a culture process and acquiring a plurality of images, extracting a colony region of the cells from the image, extracting a high luminance region on the basis of a group of pixels with larger luminance values than a standard value from among pixels constituting the image, extracting an extraction target region with relatively high contrast in the colony region on the basis of the colony and high luminance regions, and outputting the extraction target region as an extraction result, wherein as a relationship among the colony, high luminance, and extraction target regions, the colony region is formed, the high luminance region is then formed therein, and the extraction target region is then formed in the high luminance region in the culture process of the cells.
    Type: Application
    Filed: April 12, 2021
    Publication date: September 30, 2021
    Applicant: NIKON CORPORATION
    Inventors: Tomoro DAN, Hiroaki KII, Takayuki UOZUMI, Yasujiro KIYOTA
  • Patent number: 11132789
    Abstract: A target including a reference object of a known size is prepared. The reference object from target image data, which is generated by photographing the target using a survey instrument, is detected through image processing to calculate first size data on dimensions of the reference object. A defect from external appearance image data, which is generated by photographing an external appearance of a structure using the survey instrument, is detected through image processing to calculate defect data on dimensions of the defect. The first size data is compared with second size data on actual dimensions of the reference object to calculate correction data, which is used to correct the defect data.
    Type: Grant
    Filed: June 14, 2017
    Date of Patent: September 28, 2021
    Assignee: NIKON-TRIMBLE CO., LTD.
    Inventor: Yuichi Ohshima
  • Publication number: 20210292703
    Abstract: A passage timing calculation device includes a processor and a memory encoded with instructions executed by the processor, wherein the instructions causing the processor to perform operations comprising calculating a time change in an area occupied by an extraction target region that is a region in which a striated pattern appears from a plurality of images of pluripotent stem cells captured at different times, detecting a change point of the time change in an area occupied by the extraction target region, and calculating a passage timing of the pluripotent stem cells on the basis of the change point.
    Type: Application
    Filed: April 7, 2021
    Publication date: September 23, 2021
    Applicants: NIKON CORPORATION, KYOTO UNIVERSITY
    Inventors: Tomoro DAN, Hiroaki KII, Takayuki UOZUMI, Yoshiko SATO, Shinsuke YOSHIDA
  • Publication number: 20210291222
    Abstract: A mist generating apparatus sprays a surface of an object (P) to be treated with a carrier gas (CGS) of mist (Mst) of a solution containing fine particles or molecules of a material substance, so that a layer of the material substance is deposited on the surface of the object (P) to be treated. The mist generating device includes a mist generator (14) for atomizing the solution to feed the carrier gas (CGS) containing the mist (Mst), and an ultraviolet irradiator (20B) for applying ultraviolet rays having a wavelength of 400 nm or lower to the mist (Mst) floating in the carrier gas (CGS) in a flow path extending from the mist generator (14) until the carrier gas (CGS) is sprayed on the surface of the object (P) to be treated.
    Type: Application
    Filed: January 29, 2021
    Publication date: September 23, 2021
    Applicant: NIKON CORPORATION
    Inventor: Yasutaka NISHI
  • Publication number: 20210294181
    Abstract: A camera body with which it is possible to improve the effect of shake correction, a camera accessory, and an information transmission method. The camera body of the present invention is a camera body to which a camera accessory can be detachably mounted, and is provided with: a movable section which is movable to correct shaking of the camera body; a detection unit which detects the shake and outputs a detection signal; a calculation unit which, on the basis of the detection signal, calculates an amount of movement of the movable section; and a transmission unit which transmits, to the camera accessory, body-side information the calculation unit uses to calculate the amount of movement.
    Type: Application
    Filed: July 12, 2019
    Publication date: September 23, 2021
    Applicant: NIKON CORPORATION
    Inventor: Sueyuki OHISHI
  • Publication number: 20210297018
    Abstract: Provided is an encoder, which is provided in a driving apparatus comprising a motor section configured to drive a first displacement section, which is connected to a fixed section via an elastic body, and a transmission section configured to convert a displacement of the first displacement section and transmit the displacement to the second displacement section, comprising: a first detector configured to detect first displacement information of the first displacement section; a second detector configured to detect second displacement information of the second displacement section; a third detector configured to detect third displacement information of the motor section relative to the fixed section; and a computing section configured to obtain information related to a driving amount of the motor section using the first displacement information and the second displacement information, and obtain information of a load on the motor section using the third displacement information.
    Type: Application
    Filed: March 24, 2021
    Publication date: September 23, 2021
    Applicant: NIKON CORPORATION
    Inventors: Kenji OMATA, Koichi SAKATA
  • Publication number: 20210296386
    Abstract: An imaging device, includes: an imaging unit in which are disposed a plurality of pixels, each including a filter that is capable of changing a wavelength of light passing therethrough to a first wavelength and to a second wavelength and a light reception unit that receives light that has passed through the filter, and that captures an image via an optical system; an analysis unit that analyzes the image captured by the imaging unit; and a control unit that controls the wavelength of the light to be transmitted, by the filter based upon a result of analysis by the analysis unit.
    Type: Application
    Filed: June 3, 2021
    Publication date: September 23, 2021
    Applicant: NIKON CORPORATION
    Inventor: Sota NAKANISHI
  • Publication number: 20210297598
    Abstract: A camera body with which it is possible to improve the effect of shake correction, a camera accessory, and an information transmission method wherein the camera body to which a camera accessory can be detachably mounted, and includes: a movable section which is movable to correct shaking of the camera body; a detection unit which detects the shake and outputs a detection signal; a calculation unit which, on the basis of the detection signal, calculates an amount of movement of the movable section; and a transmission unit which transmits, to the camera accessory, body-side information the calculation unit uses to calculate the amount of movement.
    Type: Application
    Filed: July 12, 2019
    Publication date: September 23, 2021
    Applicant: NIKON CORPORATION
    Inventor: Sueyuki OHISHI
  • Publication number: 20210294117
    Abstract: An optical unit includes an optical system that includes a focal point on an incident side of light at a position for setting a display image of an object and that is configured to emit light from a focal plane as parallel light. The optical unit also includes a housing section housing the optical system and is configured so as to satisfy a condition equation expressed by IB?7570 mm3 wherein IB is a viewable area where the display image is viewable.
    Type: Application
    Filed: June 4, 2021
    Publication date: September 23, 2021
    Applicant: NIKON CORPORATION
    Inventors: Masahiro MIZUTA, Ryoichi SATAKA, Tomohiro KAWASAKI
  • Patent number: 11125984
    Abstract: A compact zooming optical system, an optical apparatus and a method for manufacturing the zooming optical system having a vibration reduction function, a high zooming ratio, a wide-angle view and superb optical performance are provided, the system including, in order from an object side: a first lens group G1 having positive refractive power; a second lens group G2 having negative refractive power; a third lens group G3 having positive refractive power; and a fourth lens group G4 having negative refractive power; upon zooming from a wide-angle end state to a telephoto end state, a distance between the first lens group G1 and the second lens group G2, a distance between the second lens group G2 and the third lens group G3 and a distance between the third lens group G3 and the fourth lens group G4 being respectively varied; the third lens group G3 having, in order from the object side, a first segment group G31 having positive refractive power and a second segment group G32; the second segment group G32 being m
    Type: Grant
    Filed: March 2, 2017
    Date of Patent: September 21, 2021
    Assignee: Nikon Corporation
    Inventor: Masashi Yamashita
  • Patent number: 11126094
    Abstract: A liquid crystal exposure apparatus that exposes a substrate with an illumination light via a projection optical system is equipped with: a substrate holder that holds the substrate; a substrate encoder system that includes head units and scales, and acquires the position information of the substrate holder on the basis of the output of the head units; and a drive section that relatively moves one of the head units and the scales on the substrate holder with respect to the other.
    Type: Grant
    Filed: December 10, 2019
    Date of Patent: September 21, 2021
    Assignee: NIKON CORPORATION
    Inventors: Yasuo Aoki, Atsushi Hara, Takachika Shimoyama, Toru Kawaguchi, Katsuhiro Shimatake, Iori Noda
  • Publication number: 20210286987
    Abstract: To determine the state of a subject person with a simple structure, an image determining device includes: an imaging unit that captures an image from a first direction, the image including the subject person; a first detector that detects size information from the image, the size information being about the subject person in the first direction; a second detector that detects position-related information, the position-related information being different from the information detected by the first detector; and a determining unit that determines the state of the subject person, based on a result of the detection performed by the first detector and a result of the detection performed by the second detector.
    Type: Application
    Filed: June 2, 2021
    Publication date: September 16, 2021
    Applicant: NIKON CORPORATION
    Inventors: Tetsuya YAMAMOTO, Masahiro NEI, Isao TOTSUKA, Tomoyuki MATSUYAMA, Masamitsu YANAGIHARA, Satoshi HAGIWARA, Masakazu SEKIGUCHI
  • Patent number: 11119330
    Abstract: There are provided a reticle, a reticle unit, and an optical apparatus, such as a rifle scope, each having a novel configuration that allows formation of a desired pattern. In a reticle 30A1 on which a pattern that serves as an indicator when an object under observation is visually recognized is formed, the pattern is formed of protruding sections 33a and 33b provided on a pattern formation surface 31a of a plate-shaped optical member 31. The protruding sections 33a and 33b are each formed of a plurality of protruding ridges 133 (structural elements) extending in the lengthwise direction of a line that forms the pattern in parallel to the widthwise direction of the line.
    Type: Grant
    Filed: May 31, 2018
    Date of Patent: September 14, 2021
    Assignees: NIKON CORPORATION, NIKON VISION CO., LTD.
    Inventors: Koichi Watanabe, Jun Kawakami, Katsunori Tomita, Yasuaki Ishikawa, Satoru Okazaki
  • Patent number: 11119411
    Abstract: In a drive method for a spatial light modulator, out of a first boundary region and a second boundary region arranged adjacently in a Y-direction and extending in an X-direction, mirror elements arranged at a first pitch not resolved by a projection optical system, in the X-direction in the first boundary region are set in the phase 0, and the other mirror elements therein are set in the phase ?; mirror elements arranged at a second pitch not resolved by the projection optical system, in the X-direction in the second boundary region are set in the phase ?, and the other mirror elements therein are set in the phase 0.
    Type: Grant
    Filed: July 15, 2014
    Date of Patent: September 14, 2021
    Assignee: Nikon Corporation
    Inventors: Soichi Owa, Yoji Watanabe
  • Publication number: 20210278571
    Abstract: A lens barrel is capable of changing the aperture diameter according to a zoom position while having a short length. A lens barrel includes: a aperture unit having a cam follower; and a moving tube having a cam groove for engaging the cam follower, the moving tube being provided at the outer circumference of the aperture unit and able to move along the optical axis direction.
    Type: Application
    Filed: June 4, 2019
    Publication date: September 9, 2021
    Applicant: NIKON CORPORATION
    Inventors: Kunihiko SHIMIZU, Mizuki WAYU
  • Patent number: 11112598
    Abstract: An exposure device that draws a pattern on a substrate by shining a beam from a light source device on substrate and scanning the beam in a main scanning direction while varying the intensity of beam according to pattern information, including: a scanning unit having a beam scanning unit that includes a polygonal mirror whereby the beam is oriented to scan the beam, and light detector for photoelectric detection of reflected light generated when beam is shined on substrate; an electro-optical element for controlling the beam's intensity modulation according to pattern information such that at least part of second pattern to be newly drawn is drawn on top of at least part of first pattern formed on substrate; and a measurement unit measuring relative positional relationship between the first and second pattern on the basis of a detection signal output by the detector while second pattern is drawn on substrate.
    Type: Grant
    Filed: March 28, 2017
    Date of Patent: September 7, 2021
    Assignee: NIKON CORPORATION
    Inventors: Yoshiaki Kito, Masakazu Hori, Yosuke Hayashida, Masaki Kato
  • Publication number: 20210268586
    Abstract: A calculation device used in a manufacturing apparatus for producing a 3D manufactured object from a solidified layer formed by heating a powder material by irradiation with an energy beam, includes a detection unit configured to obtain a state of at least a part of a predetermined region including a melted portion in which the powder material melts by being heated by irradiation with an energy beam, and an output unit configured to output state information based on the state obtained by the detection unit to change a manufacturing condition of the manufacturing apparatus.
    Type: Application
    Filed: June 13, 2018
    Publication date: September 2, 2021
    Applicants: NIKON CORPORATION, TECHNOLOGY RESEARCH ASSOCIATION FOR FUTURE ADDITIVE MANUFACTURING
    Inventor: Koki TAKESHITA
  • Publication number: 20210272833
    Abstract: A measurement system used in a manufacturing line for micro-devices includes: a plurality of measurement devices in which each device performs measurement processing on a substrate; and a carrying system to perform delivery of a substrate with the plurality of measurement devices. The plurality of measurement devices includes a first measurement device that acquires position information on a plurality of marks formed on a substrate, and a second measurement device that acquires position information on a plurality of marks formed on a substrate. Position information on a plurality of marks formed on a substrate can be acquired under a setting of a first predetermined condition in the first measurement device, and position information on a plurality of marks formed on another substrate can be acquired under a setting of a second predetermined condition different from the first predetermined condition in the second measurement device.
    Type: Application
    Filed: May 18, 2021
    Publication date: September 2, 2021
    Applicant: NIKON CORPORATION
    Inventors: Go ICHINOSE, Tomonori DOSHO
  • Publication number: 20210273586
    Abstract: A lens barrel includes: an electromechanical conversion element; an elastic body having a joining surface, a drive surface, and grooves; a motion member rotating by vibration wave of the drive surface; a rotating ring having a recess part and rotating by rotation of the motion member; a moving ring engaged to the recess part and moving to an optical axis direction by rotation of the rotating ring; and a lens held in the moving ring; wherein the element is made of a material having sodium potassium niobate, potassium niobate, sodium niobate or barium titanate, wherein a value of T/(B+C) is within a range of from 1.3 to 2.8 when: length from the drive surface to a base unit of the groove is defined as T; length from the base unit of the groove to the joining surface is defined as B; and thickness of the element is defined as C.
    Type: Application
    Filed: May 19, 2021
    Publication date: September 2, 2021
    Applicant: NIKON CORPORATION
    Inventors: Takatoshi ASHIZAWA, Azusa MUTO
  • Patent number: 11106145
    Abstract: An exposure system is equipped with: chambers in a first row that are disposed on the +X side with respect to a C/D installed on a floor surface; chambers in a second row that are disposed on the +Y side of the chambers in the first row, facing the chambers in the first row; and a measurement chamber and a control rack that are disposed adjacently on the ?X side with respect to the chambers in the first row and the second row and besides on the +X side of the C/D. Inside at least some of the chambers, an exposure room where exposure is performed is formed, and the control rack distributes utility supplied from below the floor surface to each of the chambers in the first row and the second row.
    Type: Grant
    Filed: October 12, 2017
    Date of Patent: August 31, 2021
    Assignee: NIKON CORPORATION
    Inventor: Kenichiro Murata
  • Patent number: 11107718
    Abstract: A measurement system to be used in a manufacturing line for micro-devices is provided independently from an exposure apparatus. The measurement system has measurement devices that each performs measurement processing on substrates (e.g., substrates that have gone through at least one processing but before being coated with a sensitive agent), and a carrying system for performing delivery of substrates to/from the measurement devices. The measurement devices include a first measurement device that acquires position information on a plurality of marks formed on a substrate under a setting of a first condition, and a second measurement device that acquires position information on a plurality of marks formed on another substrate (e.g., another substrate included in the same lot as the substrate on which acquiring position information is performed under the setting of the first condition in the first measurement device) under a setting of a first condition.
    Type: Grant
    Filed: May 7, 2020
    Date of Patent: August 31, 2021
    Assignee: NIKON CORPORATION
    Inventors: Go Ichinose, Tomonori Dosho
  • Patent number: 11106023
    Abstract: A variable magnification optical system comprising, in order from an object side, a first lens group having positive refractive power, a second lens group having negative refractive power, a third lens group having positive refractive power, and a rear lens group having positive refractive power; upon varying a magnification, a distance between the first lens group and the second lens group being varied, a distance between the second lens group and the third lens group being varied, and a distance between the third lens group and the rear lens group being varied; the rear lens group comprising a focusing lens group which is moved upon carrying out focusing from an infinitely distant object to a closely distant object; and predetermined conditional expression(s) being satisfied, thereby various aberrations being corrected superbly.
    Type: Grant
    Filed: September 11, 2017
    Date of Patent: August 31, 2021
    Assignee: Nikon Corporation
    Inventor: Takeshi Umeda
  • Patent number: 11108978
    Abstract: An image sensor includes: a first pixel having a first photoelectric conversion unit that photoelectrically converts light to generate a charge, a first accumulation unit that accumulates the charge generated by the first photoelectric conversion unit, and a first output unit that is connected to the first accumulation unit; a second pixel having a second photoelectric conversion unit that photoelectrically converts light to generate a charge, a second accumulation unit that accumulates the charge generated by the second photoelectric conversion unit, and a second output unit that is connected to and disconnected from the second accumulation unit via a second connection unit; and an adjustment unit that adjusts capacitances of the first accumulation unit and the second accumulation unit if a signal based on the charges generated by the first photoelectric conversion unit and the second photoelectric conversion unit is output from the first output unit.
    Type: Grant
    Filed: January 31, 2018
    Date of Patent: August 31, 2021
    Assignee: NIKON CORPORATION
    Inventor: Shigeru Matsumoto
  • Publication number: 20210266475
    Abstract: An image sensor, includes: a plurality of pixels arranged along a first direction, each of which includes a photoelectric conversion unit that generates an electric charge through photoelectric conversion of light, and outputs a signal generated based upon the electric charge generated in the photoelectric conversion unit; a first signal line to which signals from one or more pixels among the plurality of pixels are output; a second signal line to which a signal from another pixel among the plurality of pixels is output; and an arithmetic unit that executes an arithmetic operation with a signal generated by combining the signals from the one or more pixels output to the first signal line and the signal output to the second signal line.
    Type: Application
    Filed: May 12, 2021
    Publication date: August 26, 2021
    Applicant: NIKON CORPORATION
    Inventor: Atsushi KOMAI
  • Patent number: 11102432
    Abstract: An imaging device includes: a first image sensor comprising first pixels that receive incident light, and that include a first and second photoelectric conversion units that are arranged in a first direction; and a second image sensor including second pixels that receive light that has passed through the first image sensor, and that include a third and fourth photoelectric conversion units that are arranged in a second direction that is different from the first direction.
    Type: Grant
    Filed: November 4, 2019
    Date of Patent: August 24, 2021
    Assignee: NIKON CORPORATION
    Inventor: Akira Izumi
  • Patent number: 11099366
    Abstract: A zoom lens, comprises: in order from an object, a first lens group (G1) having positive refractive power; a second lens group (G2) having negative refractive power; a third lens group (G3) having positive refractive power; a fourth lens group (G4) having negative refractive power; and a fifth lens group (G5) having positive refractive power, wherein, upon zooming from a wide-angle end state to a telephoto end state, a distance between each of lens groups and a lens group adjacent thereto changes to satisfy the following conditional expression: 2.90<|MV5/MV2|<11.50 where, MV5 denotes, upon zooming from a wide-angle end state to a telephoto end state, a moving amount of the fifth lens group with an image surface as a reference; and MV2 denotes, upon zooming from the wide-angle end state to the telephoto end state, a moving amount of the second lens group with the image surface as the reference.
    Type: Grant
    Filed: December 9, 2016
    Date of Patent: August 24, 2021
    Assignee: Nikon Corporation
    Inventor: Saburo Masugi
  • Patent number: 11099007
    Abstract: System and method for monitoring of performance of a mirror array of a digital scanner with a use of light, illuminating the mirror array at grazing (off-axis) incidence, and an optical imaging system that includes a lateral shearing interferometer (operated in either static or a phase-shifting condition) during and without interrupting the process of exposure of the workpiece with the digital scanner, to either simply identify problematic pixels for further troubleshooting or measure the exact magnitude of the deformation of a mirror element of the mirror array.
    Type: Grant
    Filed: November 6, 2019
    Date of Patent: August 24, 2021
    Assignee: Nikon Corporation
    Inventor: Eric Peter Goodwin
  • Patent number: 11099483
    Abstract: Extreme ultra-violet (EUV) lithography ruling engine specifically configured to print one-dimensional lines on a target workpiece includes source of EUV radiation; a pattern-source defining 1D pattern; an illumination unit (IU) configured to irradiate the pattern-source; and projection optics (PO) configured to optically image, with a reduction factor N>1, the 1D pattern on image surface that is optically-conjugate to the 1D pattern. Irradiation of the pattern-source can be on-axis or off-axis. While 1D pattern has first spatial frequency, its optical image has second spatial frequency that is at least twice the first spatial frequency. The pattern-source can be flat or curved. The IU may include a relay reflector. A PO's reflector may include multiple spatially-distinct reflecting elements aggregately forming such reflector. The engine is configured to not allow formation of optical image of any 2D pattern that has spatial resolution substantially equal to a pitch of the 1D pattern of the pattern-source.
    Type: Grant
    Filed: May 18, 2017
    Date of Patent: August 24, 2021
    Assignee: Nikon Corporation
    Inventors: Donis G. Flagello, David M. Williamson, Stephen P. Renwick, Daniel Gene Smith, Michael B. Binnard
  • Patent number: 11097426
    Abstract: A carrier system and method carries a plate-like object to an object mounting section. The system imparts vibration to the object that has been moved such that the object is vibrating when the object is placed onto the mounting section.
    Type: Grant
    Filed: July 10, 2020
    Date of Patent: August 24, 2021
    Assignee: NIKON CORPORATION
    Inventor: Hideaki Hara
  • Publication number: 20210255555
    Abstract: In a beam irradiation apparatus in which a movable body holds an object, a mark detection system detects a first mark on the movable body while moving the movable body in a first direction and changing an irradiation position of a measurement beam in the first direction, the mark detection system detects a second mark while moving the movable body in the first direction and changing the irradiation position of the measurement beam in the first direction, a controller controls a position of the movable body in a second direction intersecting the first direction during a time period between the detection of the first mark and the detection of the second mark, and the controller controls the movement of the movable body to adjust a positional relation between the object on the movable body and a processing beam, based on results of the detection of the first and second marks.
    Type: Application
    Filed: April 16, 2021
    Publication date: August 19, 2021
    Applicant: NIKON CORPORATION
    Inventor: Akihiro UEDA
  • Publication number: 20210258526
    Abstract: An image sensor includes: first pixels, each of which receives a pair of light fluxes and outputs a pair of first analog signals; an A/D conversion unit that converts each of pairs of first analog signals to a pair of first digital signals; a digital adder unit that generates digital sum signals each by adding together the pair of first digital signals among pairs of first digital signals; a first output unit that outputs pairs of first digital signals to an external recipient; and a second output unit that outputs the digital sum signals to an external recipient.
    Type: Application
    Filed: May 6, 2021
    Publication date: August 19, 2021
    Applicant: NIKON CORPORATION
    Inventor: Yosuke KUSAKA
  • Patent number: 11092879
    Abstract: A camera system and a lens barrel capable of improving practicality and convenience by enabling smooth lens exchange in a lens-interchangeable camera having a vibration correction mechanism that integrally drives a lens barrel and an image capturing unit. A lens barrel to which a camera body can be detachably attached, the lens barrel including: a first barrel having a first engaging portion that engages with a first portion of the camera body; and a second barrel disposed inside the first barrel and having an optical system and a second engaging portion that engages with a second portion of the camera body.
    Type: Grant
    Filed: April 26, 2017
    Date of Patent: August 17, 2021
    Assignee: NIKON CORPORATION
    Inventors: Hisanori Togawa, Takumi Nakano, Hiroki Takita, Marie Shimoyama
  • Patent number: 11095830
    Abstract: An image-capturing device includes: an image sensor that includes an imagecapturing area where an image of a subject is captured; a setting unit that sets imagecapturing conditions to be applied to the image-capturing area; a selection unit that selects pixels to be used for interpolation from pixels present in the image-capturing area; and a generation unit that generates an image of the subject captured in the image-capturing area with signals generated through interpolation executed by using signals output from the pixels selected by the selection unit, wherein: the selection unit makes a change in selection of at least some of the pixels to be selected depending upon the image-capturing conditions set by the setting unit.
    Type: Grant
    Filed: March 23, 2020
    Date of Patent: August 17, 2021
    Assignee: NIKON CORPORATION
    Inventors: Takashi Shionoya, Toshiyuki Kanbara, Naoki Sekiguchi
  • Patent number: 11086236
    Abstract: In an exposure apparatus, on a substrate holder (34), a plurality of grating areas (RG) is arranged mutually apart in the X-axis direction, and a plurality of heads (66a to 66d) that irradiates a measurement beam with respect to the grating area and can move in the Y-axis direction is arranged outside of the substrate holder. A control system controls movement of the substrate holder in at least directions of three degrees of freedom within an XY plane, based on measurement information of at least three heads of the plurality of heads facing the grating area and measurement information of a measurement device that measures position information of the plurality of heads. The measurement beam of each of the plurality of heads, during the movement of substrate holder in the X-axis direction, moves off of one of the plurality of grating areas and switches to another adjacent grating area.
    Type: Grant
    Filed: June 25, 2020
    Date of Patent: August 10, 2021
    Assignee: NIKON CORPORATION
    Inventors: Akinori Shirato, Takashi Shibuya
  • Patent number: 11086405
    Abstract: Provided is a convenient display device including: a display unit capable of projecting a projection image on a domain in accordance with a position of a user; and a judgment unit that judges whether the projection image can be projected on the domain.
    Type: Grant
    Filed: July 26, 2019
    Date of Patent: August 10, 2021
    Assignee: NIKON CORPORATION
    Inventors: Atsushi Tanaka, Kumiko Ishida, Toru Miyakoshi, Chiori Saito, Michiyo Ogawa, Masakazu Sekiguchi
  • Patent number: 11086115
    Abstract: A microscope apparatus includes an illumination optical system that emits activating light and exciting light, an image capturing unit that captures an image formed by an imaging optical system, an image processing unit that carries out image processing using an image capturing result from the image capturing unit, and a controller. The controller provides a plurality of image generation periods and interrupt periods; causes, in the image generation periods, the activated fluorescent material to be irradiated with the exciting light and causes the image capturing unit to capture an image of the fluorescent light from the activated fluorescent material in a plurality of frame periods; and sets an intensity of the exciting light in the interrupt periods to be lower than an intensity in the image generation periods or causes the emission of the exciting light to stop in the interrupt periods.
    Type: Grant
    Filed: September 26, 2017
    Date of Patent: August 10, 2021
    Assignee: NIKON CORPORATION
    Inventors: Wataru Tomosugi, Kenji Takatsuka
  • Patent number: 11089223
    Abstract: An image-capturing unit includes: an image-capturing chip; a power supply circuit unit that outputs electrical power to be fed to the image-capturing chip; a power supply line that feeds electrical power from the power supply circuit unit to the image-capturing chip; a disconnecting unit that is provided to the power supply line and is electrically disconnecting the power supply circuit unit and the image-capturing chip when a leakage current of the image-capturing chip is measured; and an implementation substrate on which the power supply circuit unit, the image-capturing chip, the power supply line and the disconnecting unit are implemented.
    Type: Grant
    Filed: May 12, 2020
    Date of Patent: August 10, 2021
    Assignee: NIKON CORPORATION
    Inventors: Hirofumi Arima, Ryoichi Suganuma, Ryuuzou Motoori
  • Patent number: 11086110
    Abstract: Comprising a positive first lens group G1 disposed at a most object side, a negative intermediate group G2 disposed at an image side of the first lens group G1, a positive focusing group G3 disposed at an image side of the intermediate group G2, the focusing group G3 being moved upon focusing, and a positive image side group G4 disposed at an image side of the focusing group G3; upon varying magnification, a distance between the first lens group G1 and the intermediate group G2, a distance between the intermediate group G2 and the focusing group G3 and a distance between the focusing group G3 and the image side group G4 being varied; and a predetermined conditional expression being satisfied. Whereby a variable magnification optical system having excellent optical performance and a focusing lens group reduced in weight in order to attain high speed focusing operation, and others are provided.
    Type: Grant
    Filed: September 16, 2016
    Date of Patent: August 10, 2021
    Assignee: NIKON CORPORATION
    Inventor: Kosuke Machida
  • Publication number: 20210239800
    Abstract: A distance detector 10 includes a light projecting unit 100 which projects light toward a target body, a light receiving unit 200 which receives a reflected light from the target body, a time detection unit 310 which detects a light receiving time from the projecting of measuring light by the light projecting unit 100 to the receiving of the reflected light by the light receiving unit 200, a calculation unit 320 which calculates the distance to the target body based on a detection result of the light receiving time by the time detection unit 310, and an evaluation unit 340 which evaluates the reliability of a calculation result of the distance to the target body by the calculation unit 320 based on a deviation of the distance corresponding to the calculation result from a reference value regarding the distance to the target body.
    Type: Application
    Filed: January 28, 2021
    Publication date: August 5, 2021
    Applicants: NIKON VISION CO., LTD., NIKON CORPORATION
    Inventors: Takehito NONOMURA, Takeshi INOUE
  • Publication number: 20210242044
    Abstract: Provided is a substrate bonding apparatus comprising: a first holding unit for holding a first substrate; and a second holding unit for holding a second substrate, wherein the substrate bonding apparatus is configured to bond the first substrate and the second substrate by, after forming a contact region between a part of the first substrate and a part of the second substrate, expanding the contact region to form an initially bonded region and releasing the second substrate having the initially bonded region formed thereon from the second holding unit.
    Type: Application
    Filed: April 20, 2021
    Publication date: August 5, 2021
    Applicant: NIKON CORPORATION
    Inventors: Hajime MITSUISHI, Isao SUGAYA, Masaki TSUNODA, Kazuhiro SUZUKI, Takashi SHIOMI, Minoru FUKUDA
  • Publication number: 20210243698
    Abstract: A program causes a processor to execute: acquisition processing through which information related to a position is obtained; first transmission processing through which a signal that causes an external device in a first state to shift into a second state is transmitted; and second transmission processing through which, after the first transmission processing, the information obtained through the acquisition processing is transmitted to the external device.
    Type: Application
    Filed: November 5, 2018
    Publication date: August 5, 2021
    Applicant: NIKON CORPORATION
    Inventor: Naotaka YAMASHITA
  • Publication number: 20210243396
    Abstract: An image sensor includes a first voltage source that supplies a first voltage and a plurality of pixels supplied with the first voltage. The pixel includes a photoelectric conversion unit that photoelectrically converts incident light, an accumulation unit to which an electric charge resulting from photoelectric conversion by the photoelectric conversion unit is transferred and accumulated, a transfer unit that transfers the electric charge from the photoelectric conversion unit to the accumulation unit; a second voltage source that supplies a second voltage, and a supply unit that supplies the transfer unit with a transfer signal based on either the first voltage supplied by the first voltage source or the second voltage supplied by the second voltage source.
    Type: Application
    Filed: April 22, 2021
    Publication date: August 5, 2021
    Applicant: NIKON CORPORATION
    Inventor: Osamu SARUWATARI
  • Publication number: 20210243355
    Abstract: A lens barrel of the invention includes: an imaging optical system including a focus adjustment lens; a driver that drives the focus adjustment lens in a direction of an optical axis; a transceiver that transmits and receives a signal to and from a camera body; and a controller that controls the transceiver to repeatedly transmit a first image plane transfer coefficient which is determined in correspondence with a position of the focus adjustment lens included in the imaging optical system and a second image plane transfer coefficient which does not depend on the position of the focus adjustment lens to the camera body at a predetermined interval, and, when the controller repeatedly transmits the second image plane transfer coefficient to the camera body, the controller varies the second image plane transfer coefficient over time.
    Type: Application
    Filed: April 12, 2021
    Publication date: August 5, 2021
    Applicant: NIKON CORPORATION
    Inventor: Hiroyuki TOMITA
  • Patent number: 11079577
    Abstract: A variable magnification optical system comprising, in order from an object side, a first lens group having negative refractive power, a first intermediate lens group having positive refractive power, a second intermediate lens group having negative refractive power and a rear lens group; upon varying a magnification from a wide angle end state to a telephoto end state, a distance between the first lens group and the first intermediate lens group being varied, a distance between the first intermediate lens group and the second intermediate lens group being varied, and a distance between the second intermediate lens group and the rear lens group being varied; the rear lens group comprising at least one focusing lens group which is moved upon carrying out focusing from an infinitely distant object to a closely distant object and at least one lens component at an image side of the most image side focusing lens group in the focusing lens groups; and predetermined conditional expressions being satisfied, thereby t
    Type: Grant
    Filed: April 5, 2017
    Date of Patent: August 3, 2021
    Assignee: NIKON CORPORATION
    Inventor: Kosuke Machida
  • Patent number: 11079574
    Abstract: A zoom lens consists of, in order from an object, a first lens group having a negative refractive power, a second lens group having a positive refractive power, a third lens group having a negative refractive power, and a fourth lens group having a positive refractive power. Zooming is performed by changing respective distances between the first and second lens groups, the second and third lens groups, and the third and fourth lens groups. The first lens group consists of, in order from an object, a negative lens, a negative lens and a positive lens, the second lens group consists of five lenses, and the third lens group consists of a bi-concave negative lens.
    Type: Grant
    Filed: October 29, 2019
    Date of Patent: August 3, 2021
    Assignee: Nikon Corporation
    Inventor: Keigo Koida
  • Patent number: 11082646
    Abstract: When the amplification ratio is low and strong incident light causes a large charge, the signal retrieved from regions where the incident light is weak is also weak, but when the amplification ratio is high in regions where the incident light is weak, the signal retrieved from regions where the incident light is strong becomes saturated. Therefore, the dynamic range of the imaging unit is narrow. Provided is an imaging unit comprising an imaging section that includes a first group having one or more pixels and a second group having one or more pixels different from those of the first group; and a control section that, while a single charge accumulation is performed in the first group, causes pixel signals to be output by performing charge accumulation in the second group a number of times differing from a number of times charge accumulation is performed in the first group.
    Type: Grant
    Filed: April 9, 2020
    Date of Patent: August 3, 2021
    Assignee: NIKON CORPORATION
    Inventor: Shiro Tsunai
  • Patent number: 11079607
    Abstract: An image display device includes: an input unit that inputs image data constituted with pixel data, each set of the pixel data being generated based upon a plurality of image signals output from a plurality of image-capturing pixels arrayed in correspondence to a plurality of photographic micro-lenses distinct from one another; a generation unit that generates display image data containing three-dimensional information based upon the image data; a display unit constituted with a plurality of display pixels disposed in a two-dimensional pattern, which emits light fluxes from the plurality of display pixels in correspondence to the display image data; and a micro-lens array that includes a plurality of micro-lenses, via which a three-dimensional image is formed by combining the light fluxes emitted from the plurality of display pixels, disposed in a two-dimensional array pattern.
    Type: Grant
    Filed: April 22, 2019
    Date of Patent: August 3, 2021
    Assignee: NIKON CORPORATION
    Inventor: Toru Iwane
  • Patent number: 11079575
    Abstract: Comprising, in order from an object side: a first lens group having positive refractive power, a second lens group having negative refractive power, a third lens group having positive refractive power, a fourth lens group having positive refractive power, and a fifth lens group having negative refractive power; upon varying a magnification, the first lens group being fixed with respect to the image plane, and each distance between the neighboring lens groups being varied; upon focusing, at least a portion of the fourth lens group being moved; and predetermined conditional expression(s) being satisfied, thereby variations in various aberrations upon varying magnification being superbly suppressed.
    Type: Grant
    Filed: October 16, 2017
    Date of Patent: August 3, 2021
    Assignee: NIKON CORPORATION
    Inventor: Tomoki Ito
  • Patent number: 11082715
    Abstract: A video compression apparatus for compressing video data as a series of frames outputted from an imaging element that has a plurality of imaging regions for imaging a subject and for which imaging conditions can be set for the respective imaging regions, includes: a setting unit configured to set, based on a plurality of imaging conditions, a search region within a reference frame used for a processing to detect, based on a compression target region, a specific region in the reference frame; and a generation unit configured to generate, based on the processing using the search region set by the setting unit, the specific region to thereby generate a motion vector.
    Type: Grant
    Filed: September 27, 2018
    Date of Patent: August 3, 2021
    Assignee: NIKON CORPORATION
    Inventors: Daisaku Komiya, Naoki Sekiguchi
  • Publication number: 20210231541
    Abstract: A sample preparation method includes: irradiating a first region of a sample with light at a time t1; irradiating a second region different from the first region with the light at a time t2 after the time t1; and fixing the sample at a time t3 after the time t2. A sample preparing apparatus includes: a light radiating unit that irradiates a first region of a sample with light at time t1 and irradiates a second region different from the first region with the light at a time t2 after the time t1; and a fixing unit that fixes the sample at a time t3 after the time t2.
    Type: Application
    Filed: April 15, 2021
    Publication date: July 29, 2021
    Applicant: NIKON CORPORATION
    Inventor: Ichiro SASE